used to the substrate atoms each other;
3) Prepare a film made by special material, different materials may be used to sputter and prepare a mixed film and compound film, and also a Tin imitation gold film can be sputtered;
4) High purity with film layer, the sputtering film layer will not be mixed with components of crucible heater material.
4) It is equipped with a low-temperature auxiliary ion beam source, directly cool coat the film at room temperature without heating, energy saving and pro